教學大綱表 (110學年度 第1學期)
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課程名稱
Course Title
(中文) 表面分析技術
(英文) Surface Analysis Techniques
開課單位
Departments
材料工程研究所
課程代碼
Course No.
T5300
授課教師
Instructor
林鴻明
學分數
Credit
3.0 必/選修
core required/optional
選修 開課年級
Level
研究所
先修科目或先備能力(Course Pre-requisites):物理 化學
課程概述與目標(Course Overview and Goals): 表面、表面層的構造、組成及電子狀態將影響材料特性。測定之方法,主要利用入射一次粒子如電子,離子,光子及中性粒子等撞擊固態表面,透過一次粒子與固態表面相互作用造成彈性及非彈性散射,因而從固態表面產生的電子、離子、或光子等二次粒子,以探討固體之表面特性。本課程將介紹因不同作用現象所衍生之分析技術,使學生由學理到分析技術瞭解材料表面分析之功能性及重要性。
教科書(Textbook) "Surface Analysis - The Principal Techniques", Edited by John C. Vickerman, John Wiley & Sons, New York (1997).
參考教材(Reference) 1.“材料分析”, 汪建民主編, 中國材料學會印行, 新竹市, 1998.
2. Kathleen Mills etc. eds., Metal Handbook Ninth Edition, Vol. 10 “Materials Characterization”, ASM, 1986.
3.“Instrumentation in Analytical Chemistry”, edited by Stuart A Bo
課程大綱 Syllabus 學生學習目標
Learning Objectives
單元學習活動
Learning Activities
學習成效評量
Evaluation
備註
Notes

No.
單元主題
Unit topic
內容綱要
Content summary
1 I. Optical Microscopy I. Optical Microscopy I. Optical Microscopy  
2 II. Scanning Electron Microscopy II. Scanning Electron Microscopy II. Scanning Electron Microscopy  
3 III. Special Techniques A. Acoustic & Thermal Wave image
B. Field-electron and field-ion emission
- Field-electron microscopy
- Field-ion emission and field-ion desorption microscopy and the atom probe
A. Acoustic & Thermal Wave image
B. Field-electron and field-ion emission
- Field-electron microscopy
- Field-ion emission and field-ion desorption microscopy and the atom probe
 
4 III. Special Techniques C. Photo-induced radiation
- X-ray microscopy and X-ray topography
- Fluorescence microscopy and spectroscopy
D. Photo-electron emission
- Photo-electron emission microscopy
- Photo-electron spectroscopy
- Field-ion emission and field-ion desorption microscopy and the atom probe
C. Photo-induced radiation
- X-ray microscopy and X-ray topography
- Fluorescence microscopy and spectroscopy
D. Photo-electron emission
- Photo-electron emission microscopy
- Photo-electron spectroscopy
- Field-ion emission and field-ion desorption microscopy and the atom probe
 
5 III. Special Techniques C. Photo-induced radiation
- X-ray microscopy and X-ray topography
- Fluorescence microscopy and spectroscopy
D. Photo-electron emission
- Photo-electron emission microscopy
- Photo-electron spectroscopy
- Field-ion emission and field-ion desorption microscopy and the atom probe
C. Photo-induced radiation
- X-ray microscopy and X-ray topography
- Fluorescence microscopy and spectroscopy
D. Photo-electron emission
- Photo-electron emission microscopy
- Photo-electron spectroscopy
- Field-ion emission and field-ion desorption microscopy and the atom probe
 
6 IV. Electrons and Ions Stimulation A. Electron-beam and ion-induced radiation
- X-ray Mapping
- Energy- and Wavelength-dispersive X-ray Spectroscopy (EDS and WDS)
- Cathodoluminescence
- Ion- and proton-induced X-ray emission
B. Electron-electron interaction
- Auger-electron microscopy and spectroscopy (AEM and AES)
- Low- and high-energy electron diffraction (LEED and HEED)
A. Electron-beam and ion-induced radiation
- X-ray Mapping
- Energy- and Wavelength-dispersive X-ray Spectroscopy (EDS and WDS)
- Cathodoluminescence
- Ion- and proton-induced X-ray emission
B. Electron-electron interaction
- Auger-electron microscopy and spectroscopy (AEM and AES)
- Low- and high-energy electron diffraction (LEED and HEED)
 
7 IV. Electrons and Ions Stimulation A. Electron-beam and ion-induced radiation
- X-ray Mapping
- Energy- and Wavelength-dispersive X-ray Spectroscopy (EDS and WDS)
- Cathodoluminescence
- Ion- and proton-induced X-ray emission
B. Electron-electron interaction
- Auger-electron microscopy and spectroscopy (AEM and AES)
- Low- and high-energy electron diffraction (LEED and HEED)
A. Electron-beam and ion-induced radiation
- X-ray Mapping
- Energy- and Wavelength-dispersive X-ray Spectroscopy (EDS and WDS)
- Cathodoluminescence
- Ion- and proton-induced X-ray emission
B. Electron-electron interaction
- Auger-electron microscopy and spectroscopy (AEM and AES)
- Low- and high-energy electron diffraction (LEED and HEED)
 
8 IV. Electrons and Ions Stimulation C. Scanning Probe Miocroscopy
- History of Scanning Tunneling Microscopy
- Atomic Force microscopy
- MFM, NFOM, etc.
C. Scanning Probe Miocroscopy
- History of Scanning Tunneling Microscopy
- Atomic Force microscopy
- MFM, NFOM, etc.
 
9 期中考 I-IV.C章 期中評量  
10 IV. Electrons and Ions Stimulation D. Ion Microscopy
- Ion-Scattering Spectroscopy
- Secondary-Ion Mass Spectroscopy
D. Ion Microscopy
- Ion-Scattering Spectroscopy
- Secondary-Ion Mass Spectroscopy
 
11 V. Pohotos Sitimulation A. Photo-induced radiation A. Photo-induced radiation  
12 V. Pohotos Sitimulation B. Photo-electron emission B. Photo-electron emission  
13 V. Pohotos Sitimulation C. Synchrotron Radiation in Materials Analysis C. Synchrotron Radiation in Materials Analysis  
14 V. Pohotos Sitimulation -Extended X-ray Absorption Fine Structure (EXAFS) -Extended X-ray Absorption Fine Structure (EXAFS)  
15 V. Pohotos Sitimulation -Extended X-ray Absorption Fine Structure (EXAFS) -Extended X-ray Absorption Fine Structure (EXAFS)  
16 V. Pohotos Sitimulation -Photoemission Spectroscopy -Photoemission Spectroscopy  
17 V. Pohotos Sitimulation -Neutron Scattering -Neutron Scattering  
18 期末考 IV.CV章 期末評量  


教學要點概述:
教材編選(Teaching Materials):
□ 1-1.簡報 Slids
□ 1-2.影音教材 Videos
□ 1-3.教具 Teaching Aids
□ 1-4.教科書 Textbook Slids
□ 1-5.其他 Other
□ 2.自編評量工具/量表 Educational Assessment
□ 3.教科書作者提供 Textbook

成績考核 Performance Evaluation: 期末考:30%   期中考:30%   作業:40%  

教學資源(Teaching Resources):
□ 教材電子檔(Soft Copy of the Handout or the Textbook)
□ 課程網站(Website)
課程網站(Website):硬碟二
扣考規定:http://eboard.ttu.edu.tw/ttuwebpost/showcontent-news.php?id=504