T5300 教學大綱表

教學大綱表 (110學年度第1學期)

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課程名稱 Course Title	(中文) 表面分析技術 (英文) Surface Analysis Techniques			開課單位 Departments	材料工程研究所
				課程代碼 Course No.	T5300
授課教師 Instructor	林鴻明
學分數 Credit	3.0	必/選修 core required/optional	選修	開課年級 Level	研究所
先修科目或先備能力(Course Pre-requisites)：物理化學
課程概述與目標(Course Overview and Goals)：表面、表面層的構造、組成及電子狀態將影響材料特性。測定之方法，主要利用入射一次粒子如電子，離子，光子及中性粒子等撞擊固態表面，透過一次粒子與固態表面相互作用造成彈性及非彈性散射，因而從固態表面產生的電子、離子、或光子等二次粒子，以探討固體之表面特性。本課程將介紹因不同作用現象所衍生之分析技術，使學生由學理到分析技術瞭解材料表面分析之功能性及重要性。
教科書(Textbook)	"Surface Analysis - The Principal Techniques", Edited by John C. Vickerman, John Wiley & Sons, New York (1997).
參考教材(Reference)	1.“材料分析”, 汪建民主編, 中國材料學會印行, 新竹市, 1998. 2. Kathleen Mills etc. eds., Metal Handbook Ninth Edition, Vol. 10 “Materials Characterization”, ASM, 1986. 3.“Instrumentation in Analytical Chemistry”, edited by Stuart A Bo

課程大綱 Syllabus			學生學習目標 Learning Objectives	單元學習活動 Learning Activities	學習成效評量 Evaluation	備註 Notes
序 No.	單元主題 Unit topic	內容綱要 Content summary	學生學習目標 Learning Objectives	單元學習活動 Learning Activities	學習成效評量 Evaluation	備註 Notes
1	I. Optical Microscopy	I. Optical Microscopy	I. Optical Microscopy
2	II. Scanning Electron Microscopy	II. Scanning Electron Microscopy	II. Scanning Electron Microscopy
3	III. Special Techniques	A. Acoustic & Thermal Wave image B. Field-electron and field-ion emission - Field-electron microscopy - Field-ion emission and field-ion desorption microscopy and the atom probe	A. Acoustic & Thermal Wave image B. Field-electron and field-ion emission - Field-electron microscopy - Field-ion emission and field-ion desorption microscopy and the atom probe
4	III. Special Techniques	C. Photo-induced radiation - X-ray microscopy and X-ray topography - Fluorescence microscopy and spectroscopy D. Photo-electron emission - Photo-electron emission microscopy - Photo-electron spectroscopy - Field-ion emission and field-ion desorption microscopy and the atom probe	C. Photo-induced radiation - X-ray microscopy and X-ray topography - Fluorescence microscopy and spectroscopy D. Photo-electron emission - Photo-electron emission microscopy - Photo-electron spectroscopy - Field-ion emission and field-ion desorption microscopy and the atom probe
5	III. Special Techniques	C. Photo-induced radiation - X-ray microscopy and X-ray topography - Fluorescence microscopy and spectroscopy D. Photo-electron emission - Photo-electron emission microscopy - Photo-electron spectroscopy - Field-ion emission and field-ion desorption microscopy and the atom probe	C. Photo-induced radiation - X-ray microscopy and X-ray topography - Fluorescence microscopy and spectroscopy D. Photo-electron emission - Photo-electron emission microscopy - Photo-electron spectroscopy - Field-ion emission and field-ion desorption microscopy and the atom probe
6	IV. Electrons and Ions Stimulation	A. Electron-beam and ion-induced radiation - X-ray Mapping - Energy- and Wavelength-dispersive X-ray Spectroscopy (EDS and WDS) - Cathodoluminescence - Ion- and proton-induced X-ray emission B. Electron-electron interaction - Auger-electron microscopy and spectroscopy (AEM and AES) - Low- and high-energy electron diffraction (LEED and HEED)	A. Electron-beam and ion-induced radiation - X-ray Mapping - Energy- and Wavelength-dispersive X-ray Spectroscopy (EDS and WDS) - Cathodoluminescence - Ion- and proton-induced X-ray emission B. Electron-electron interaction - Auger-electron microscopy and spectroscopy (AEM and AES) - Low- and high-energy electron diffraction (LEED and HEED)
7	IV. Electrons and Ions Stimulation	A. Electron-beam and ion-induced radiation - X-ray Mapping - Energy- and Wavelength-dispersive X-ray Spectroscopy (EDS and WDS) - Cathodoluminescence - Ion- and proton-induced X-ray emission B. Electron-electron interaction - Auger-electron microscopy and spectroscopy (AEM and AES) - Low- and high-energy electron diffraction (LEED and HEED)	A. Electron-beam and ion-induced radiation - X-ray Mapping - Energy- and Wavelength-dispersive X-ray Spectroscopy (EDS and WDS) - Cathodoluminescence - Ion- and proton-induced X-ray emission B. Electron-electron interaction - Auger-electron microscopy and spectroscopy (AEM and AES) - Low- and high-energy electron diffraction (LEED and HEED)
8	IV. Electrons and Ions Stimulation	C. Scanning Probe Miocroscopy - History of Scanning Tunneling Microscopy - Atomic Force microscopy - MFM, NFOM, etc.	C. Scanning Probe Miocroscopy - History of Scanning Tunneling Microscopy - Atomic Force microscopy - MFM, NFOM, etc.
9	期中考	I-IV.C章	期中評量
10	IV. Electrons and Ions Stimulation	D. Ion Microscopy - Ion-Scattering Spectroscopy - Secondary-Ion Mass Spectroscopy	D. Ion Microscopy - Ion-Scattering Spectroscopy - Secondary-Ion Mass Spectroscopy
11	V. Pohotos Sitimulation	A. Photo-induced radiation	A. Photo-induced radiation
12	V. Pohotos Sitimulation	B. Photo-electron emission	B. Photo-electron emission
13	V. Pohotos Sitimulation	C. Synchrotron Radiation in Materials Analysis	C. Synchrotron Radiation in Materials Analysis
14	V. Pohotos Sitimulation	-Extended X-ray Absorption Fine Structure (EXAFS)	-Extended X-ray Absorption Fine Structure (EXAFS)
15	V. Pohotos Sitimulation	-Extended X-ray Absorption Fine Structure (EXAFS)	-Extended X-ray Absorption Fine Structure (EXAFS)
16	V. Pohotos Sitimulation	-Photoemission Spectroscopy	-Photoemission Spectroscopy
17	V. Pohotos Sitimulation	-Neutron Scattering	-Neutron Scattering
18	期末考	IV.CV章	期末評量

教學要點概述：
1.自編教材 Handout by Instructor：
□ 1-1.簡報 Slids
□ 1-2.影音教材 Videos
□ 1-3.教具 Teaching Aids
□ 1-4.教科書 Textbook
□ 1-5.其他 Other
□ 2.自編評量工具/量表 Educational Assessment
□ 3.教科書作者提供 Textbook

成績考核 Performance Evaluation：期末考：30% 期中考：30% 作業：40%

教學資源(Teaching Resources)：
□ 教材電子檔(Soft Copy of the Handout or the Textbook)
□ 課程網站(Website)
課程網站(Website)：硬碟二
扣考規定：https://curri.ttu.edu.tw/p/412-1033-1254.php