T5520 教學大綱表

教學大綱表 (112學年度第1學期)

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課程名稱 Course Title	(中文) 電子顯微鏡 (英文) Electron Microscopy			開課單位 Departments	機械與材料工程研究所
				課程代碼 Course No.	T5520
授課教師 Instructor	林鴻明
學分數 Credit	3.0	必/選修 core required/optional	選修	開課年級 Level	研究所
先修科目或先備能力(Course Pre-requisites)：無
課程概述與目標(Course Overview and Goals)：This course will cover the underlying principles of scanning and transmission electron microscopy with an emphasis on transmission electron microscopy. There will be both theoretical and practical treatment of such essential phenomena as sample preparation, microscope construction, electron optics, imaging, electron diffraction, and analytical microscopy.
教科書(Textbook)	J. W. Edington, Practical Electron Microscopy in Materials Science, MacMillan, Philips Technical Library, Eindhoven (1974). Monograph One - "The Operation and Calibration of the Electron Microscope" Monograph Two - "Elect
參考教材(Reference)	1. D. B. Williams and C. B. Carter, Transmission Electron Microscopy, Vol. I-IV, Plenum Press, New York, (1996). 2. Saul Wischnitzer, "Introduction to Electron Microscopy", 3rd Edition, Pergamon Press, New York, (1989). 3. M. H.

課程大綱 Syllabus			學生學習目標 Learning Objectives	單元學習活動 Learning Activities	學習成效評量 Evaluation	備註 Notes
序 No.	單元主題 Unit topic	內容綱要 Content summary	學生學習目標 Learning Objectives	單元學習活動 Learning Activities	學習成效評量 Evaluation	備註 Notes
1	I. Preliminary	Sample Preparation for TEM Concepts of vacuum Background Review	The student will learn the background of the development of electron microscope and the based techniques of sample preparations.
2	I. Preliminary	Sample Preparation for TEM Concepts of vacuum	The concepts of vacuum will describe for student to undersatnd the system design of TEM.
3	II. Physical Description of Electron Microscopy	Historical Background Geometric optics	The histroy of EM will introduce in this week. The principle of geometric optics is compared to the electron optics and guide student to undersatnd the electron optic system in EM.
4	II. Physical Description of Electron Microscopy	Properties of electrons Resolution Limitations of Imaging Systems	The propeties of electrons are important to understand the optics and wave properties of electron. It will affect the resolution limitation of EM. Students will guide to learn the physical properties of electron microscope.
5	II. Physical Description of Electron Microscopy	Lenses for electrons Electron Sources	The lenses of electrons will introduce in this week. Student will learn the design principle of magnetic lens. Also, the different electron sources are compared for student to know the importance of field emission source in recent EM.
6	II. Physical Description of Electron Microscopy	Operating principles of TEM, SEM, STEM Construction of TEM, SEM, STEM	Students will learn the operating principles of TEM, SEM and STEM. Also, this week will guide the student to understand the construction of TEM, SEM and STEM systems.
7	II. Physical Description of Electron Microscopy	Information obtained from TEM, SEM, STEM	The students will learn the information that electron microscope can obtain. It will help student to analysis the image and stucture of materials.
8	II. Geometry of Electron Diffraction	Reciprocal lattice constructions Ewald sphere constructions	The foundament of diffration will review for student to understand the principle of reciprocal lattice. It will help student to analysis the structure of material using electron diffraction.
9	Midterm Exam	The midterm exam will cover Chapter I to II and the the principle of reciprocal lattice that is introdcue in Chapter III.	To evalute the learn achievement of students for past 8 weeks.
10	III. Geometry of Electron Diffraction	Wavevectors formulation of diffraction, deviation parameter	Student will learn the principle and deviation of electron diffraction. The will help students to analysis the diffratcion pattern to study the structure of materials.
11	III. Geometry of Electron Diffraction	Kikuchi patterns and channelling patterns	Kikuchi patterns and channelling patterns are important in structure analysis. Students will deeply learn how to analysis the structure of materials more precisously.
12	IV. Principles of Image Formation	Interactions of electrons with matter, scattering Kinematical theory of scattering	The students will learn the interaction of electron and matter. That will affect the contrast of image. It will help to interpret the information of images. The theory of imfomation will also introduce.
13	IV. Principles of Image Formation	Kinematical theory of scattering Dynamical theory of scattering (Howie-Whelan Equations)	This week will mostly introduce the theory of image formation. Students will learn the image formation from the basic theory.
14	IV. Principles of Image Formation	Image interpretation	The case study of image interpretation will introduce in this week. Students will practically learn to interpretation image in different defects of materials.
15	V. Analytical Electron Microscopy	Electron probes, beam current vs. size SEM, STEM imaging	This weeks will introduce the analytical function of EM. Students will undersatnd the important of probe sixe and current that affect the analytical EM.
16	V. Analytical Electron Microscopy	Microdiffraction and nanodiffraction Convergent beam electron diffraction	The capacitity of micordiffration and nanomicrodiffraction are important for mordern EM in nanoanalysis. Students will guide how to use these techniques for material analysis.
17	V. Analytical Electron Microscopy	X-ray analysis Electron energy loss spectroscopy	Elemental anlysis used EM will introduce in this week. It includes EDS, WDS and EELS analysis. Students will learn how to combine the structure, composition and image analysis techniques for material study.
18	Final Exam	Final exam will cover partial of Chapeter III and include all Chapter IV to V.	Final evaulate the learn achievement of students.

教學要點概述：
教材編選(Teaching Materials)：
□ 1-1.簡報 Slids
□ 1-2.影音教材 Videos
□ 1-3.教具 Teaching Aids
□ 1-4.教科書 Textbook Slids
□ 1-5.其他 Other
□ 2.自編評量工具/量表 Educational Assessment
□ 3.教科書作者提供 Textbook

成績考核 Performance Evaluation：

教學資源(Teaching Resources)：
□ 教材電子檔(Soft Copy of the Handout or the Textbook)
□ 課程網站(Website)
課程網站(Website)：硬碟二
扣考規定：http://eboard.ttu.edu.tw/ttuwebpost/showcontent-news.php?id=504