| 課程名稱 |
(中文) 電子顯微鏡 (英文) Electron Microscopy |
開課單位 | 機械工程研究所 | ||
| 課程代碼 | T5520 | ||||
| 授課教師 | 林鴻明 | ||||
| 學分數 | 3.0 | 必/選修 | 選修 | 開課年級 | 研究所 |
| 先修科目或先備能力：無 | |||||
| 課程概述與目標：This course will cover the underlying principles of scanning and transmission electron microscopy with an emphasis on transmission electron microscopy. There will be both theoretical and practical treatment of such essential phenomena as sample preparation, microscope construction, electron optics, imaging, electron diffraction, and analytical microscopy. | |||||
| 教科書 | J. W. Edington, Practical Electron Microscopy in Materials Science, MacMillan, Philips Technical Library, Eindhoven (1974). Monograph One - "The Operation and Calibration of the Electron Microscope" Monograph Two - "Elect |
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| 參考教材 | 1. D. B. Williams and C. B. Carter, Transmission Electron Microscopy, Vol. I-IV, Plenum Press, New York, (1996). 2. Saul Wischnitzer, "Introduction to Electron Microscopy", 3rd Edition, Pergamon Press, New York, (1989). 3. M. H. |
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| 課程大綱 | 學生學習目標 | 單元學習活動 | 學習成效評量 | 備註 | ||
| 週 | 單元主題 | 內容綱要 | ||||
| 1 | I. Preliminary | Sample Preparation for TEM Concepts of vacuum Background Review |
The student will learn the background of the development of electron microscope and the based techniques of sample preparations. |
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| 2 | I. Preliminary | Sample Preparation for TEM Concepts of vacuum |
The concepts of vacuum will describe for student to undersatnd the system design of TEM. |
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| 3 | II. Physical Description of Electron Microscopy | Historical Background Geometric optics |
The histroy of EM will introduce in this week. The principle of geometric optics is compared to the electron optics and guide student to undersatnd the electron optic system in EM. |
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| 4 | II. Physical Description of Electron Microscopy | Properties of electrons Resolution Limitations of Imaging Systems |
The propeties of electrons are important to understand the optics and wave properties of electron. It will affect the resolution limitation of EM. Students will guide to learn the physical properties of electron microscope. |
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| 5 | II. Physical Description of Electron Microscopy | Lenses for electrons Electron Sources |
The lenses of electrons will introduce in this week. Student will learn the design principle of magnetic lens. Also, the different electron sources are compared for student to know the importance of field emission source in recent EM. |
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| 6 | II. Physical Description of Electron Microscopy | Operating principles of TEM, SEM, STEM Construction of TEM, SEM, STEM |
Students will learn the operating principles of TEM, SEM and STEM. Also, this week will guide the student to understand the construction of TEM, SEM and STEM systems. |
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| 7 | II. Physical Description of Electron Microscopy | Information obtained from TEM, SEM, STEM | The students will learn the information that electron microscope can obtain. It will help student to analysis the image and stucture of materials. |
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| 8 | II. Geometry of Electron Diffraction | Reciprocal lattice constructions Ewald sphere constructions |
The foundament of diffration will review for student to understand the principle of reciprocal lattice. It will help student to analysis the structure of material using electron diffraction. |
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| 9 | Midterm Exam | The midterm exam will cover Chapter I to II and the the principle of reciprocal lattice that is introdcue in Chapter III. | To evalute the learn achievement of students for past 8 weeks. |
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| 10 | III. Geometry of Electron Diffraction | Wavevectors formulation of diffraction, deviation parameter | Student will learn the principle and deviation of electron diffraction. The will help students to analysis the diffratcion pattern to study the structure of materials. |
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| 11 | III. Geometry of Electron Diffraction | Kikuchi patterns and channelling patterns | Kikuchi patterns and channelling patterns are important in structure analysis. Students will deeply learn how to analysis the structure of materials more precisously. |
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| 12 | IV. Principles of Image Formation | Interactions of electrons with matter, scattering Kinematical theory of scattering |
The students will learn the interaction of electron and matter. That will affect the contrast of image. It will help to interpret the information of images. The theory of imfomation will also introduce. |
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| 13 | IV. Principles of Image Formation | Kinematical theory of scattering Dynamical theory of scattering (Howie-Whelan Equations) |
This week will mostly introduce the theory of image formation. Students will learn the image formation from the basic theory. |
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| 14 | IV. Principles of Image Formation | Image interpretation | The case study of image interpretation will introduce in this week. Students will practically learn to interpretation image in different defects of materials. |
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| 15 | V. Analytical Electron Microscopy | Electron probes, beam current vs. size SEM, STEM imaging |
This weeks will introduce the analytical function of EM. Students will undersatnd the important of probe sixe and current that affect the analytical EM. |
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| 16 | V. Analytical Electron Microscopy | Microdiffraction and nanodiffraction Convergent beam electron diffraction |
The capacitity of micordiffration and nanomicrodiffraction are important for mordern EM in nanoanalysis. Students will guide how to use these techniques for material analysis. |
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| 17 | V. Analytical Electron Microscopy | X-ray analysis Electron energy loss spectroscopy |
Elemental anlysis used EM will introduce in this week. It includes EDS, WDS and EELS analysis. Students will learn how to combine the structure, composition and image analysis techniques for material study. |
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| 18 | Final Exam | Final exam will cover partial of Chapeter III and include all Chapter IV to V. | Final evaulate the learn achievement of students. |
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教學要點概述： |