教學大綱表 Syllabus
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課程名稱
Course Title		 (中文) 電子顯微鏡
(英文) Electron Microscopy 		開課單位
Departments		 機械與材料工程研究所
課程代碼
Course No.		 T5520
授課教師
Instructor		 林鴻明
學分數
Credit		 3.0 必/選修
core required/optional		 選修 開課年級
Level		 研究所
先修科目或先備能力Course Pre-requisites：無
課程概述與目標 Course Overview and Goals：This course will cover the underlying principles of scanning and transmission electron microscopy with an emphasis on transmission electron microscopy. There will be both theoretical and practical treatment of such essential phenomena as sample preparation, microscope construction, electron optics, imaging, electron diffraction, and analytical microscopy.
教科書
Textbook		 J. W. Edington, Practical Electron Microscopy in Materials Science, MacMillan, Philips Technical Library, Eindhoven (1974).
Monograph One - "The Operation and Calibration of the Electron Microscope"
Monograph Two - "Elect
參考教材
Reference		 1. D. B. Williams and C. B. Carter, Transmission Electron Microscopy, Vol. I-IV, Plenum Press, New York, (1996).
2. Saul Wischnitzer, "Introduction to Electron Microscopy", 3rd Edition, Pergamon Press, New York, (1989).
3. M. H.
課程大綱
Syllabus		 學生學習目標
Learning Objectives		 單元學習活動
Learning Activities		 學習成效評量
Evaluation		 備註
Notes
週
Week		 單元主題
Unit topic		 內容綱要
Content summary
1 I. Preliminary Sample Preparation for TEM
Concepts of vacuum Background Review 		The student will learn the background of the development of electron microscope and the based techniques of sample preparations.
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    2 I. Preliminary Sample Preparation for TEM
    Concepts of vacuum     		The concepts of vacuum will describe for student to undersatnd the system design of TEM.
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    3 II. Physical Description of Electron Microscopy Historical Background
    Geometric optics     		The histroy of EM will introduce in this week. The principle of geometric optics is compared to the electron optics and guide student to undersatnd the electron optic system in EM.
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    4 II. Physical Description of Electron Microscopy Properties of electrons
    Resolution Limitations of Imaging Systems     		The propeties of electrons are important to understand the optics and wave properties of electron. It will affect the resolution limitation of EM. Students will guide to learn the physical properties of electron microscope.
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    5 II. Physical Description of Electron Microscopy Lenses for electrons
    Electron Sources     		The lenses of electrons will introduce in this week. Student will learn the design principle of magnetic lens. Also, the different electron sources are compared for student to know the importance of field emission source in recent EM.
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    6 II. Physical Description of Electron Microscopy Operating principles of TEM, SEM, STEM
    Construction of TEM, SEM, STEM     		Students will learn the operating principles of TEM, SEM and STEM. Also, this week will guide the student to understand the construction of TEM, SEM and STEM systems.
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    7 II. Physical Description of Electron Microscopy Information obtained from TEM, SEM, STEM The students will learn the information that electron microscope can obtain. It will help student to analysis the image and stucture of materials.
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    8 II. Geometry of Electron Diffraction Reciprocal lattice constructions
    Ewald sphere constructions     		The foundament of diffration will review for student to understand the principle of reciprocal lattice. It will help student to analysis the structure of material using electron diffraction.
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    9 Midterm Exam The midterm exam will cover Chapter I to II and the the principle of reciprocal lattice that is introdcue in Chapter III. To evalute the learn achievement of students for past 8 weeks.
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    10 III. Geometry of Electron Diffraction Wavevectors formulation of diffraction, deviation parameter Student will learn the principle and deviation of electron diffraction. The will help students to analysis the diffratcion pattern to study the structure of materials.
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    11 III. Geometry of Electron Diffraction Kikuchi patterns and channelling patterns Kikuchi patterns and channelling patterns are important in structure analysis. Students will deeply learn how to analysis the structure of materials more precisously.
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    12 IV. Principles of Image Formation Interactions of electrons with matter, scattering
    Kinematical theory of scattering     		The students will learn the interaction of electron and matter. That will affect the contrast of image. It will help to interpret the information of images. The theory of imfomation will also introduce.
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    13 IV. Principles of Image Formation Kinematical theory of scattering
    Dynamical theory of scattering (Howie-Whelan Equations)     		This week will mostly introduce the theory of image formation. Students will learn the image formation from the basic theory.
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    14 IV. Principles of Image Formation Image interpretation The case study of image interpretation will introduce in this week. Students will practically learn to interpretation image in different defects of materials.
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    15 V. Analytical Electron Microscopy Electron probes, beam current vs. size
    SEM, STEM imaging     		This weeks will introduce the analytical function of EM. Students will undersatnd the important of probe sixe and current that affect the analytical EM.
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    16 V. Analytical Electron Microscopy Microdiffraction and nanodiffraction
    Convergent beam electron diffraction     		The capacitity of micordiffration and nanomicrodiffraction are important for mordern EM in nanoanalysis. Students will guide how to use these techniques for material analysis.
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    17 V. Analytical Electron Microscopy X-ray analysis
    Electron energy loss spectroscopy     		Elemental anlysis used EM will introduce in this week. It includes EDS, WDS and EELS analysis. Students will learn how to combine the structure, composition and image analysis techniques for material study.
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    18 Final Exam Final exam will cover partial of Chapeter III and include all Chapter IV to V. Final evaulate the learn achievement of students.
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    教學要點概述 Overview of Teaching Points：
    教材編選 Teaching Materials： ■ 自編教材 Handout by Instructor □ 教科書作者提供 Textbook
    評量方法 Evaluation： 期末考Final Exam：30%   期中考Midterm：30%   平時考Test：40%  
    教學資源 Teaching Resources： ■ 教材電子檔 Soft Copy of the Handout or the Textbook □ 課程網站 Website
    課程網站：硬碟二
    扣考規定 The rule of being able to take the final exam of the course：http://eboard.ttu.edu.tw/ttuwebpost/showcontent-news.php?id=504

    研究所：
    核心能力 期末考Final Exam 期中考Midterm 平時考Test
    核心能力一 機械與材料相關領域之專業知識 3/10 3 3 3
    核心能力二 策劃及執行專題研究之能力 2/10 2 2 2
    核心能力四 創新思考及獨立解決問題的能力 2/10 2 2 2
    核心能力五 與不同領域人員協調整合之能力 1/10 1 1 1
    核心能力七 領導、管理及規劃的能力 1/10 1 1 1
    核心能力八 終身自我學習成長的能力 1/10 1 1 1