教學大綱表 (112學年度 第1學期)
請遵守智慧財產權，勿使用非法影印教科書，避免觸法。
課程名稱
Course Title		 (中文) 電子顯微鏡
(英文) Electron Microscopy 		開課單位
Departments		 機械與材料工程研究所
課程代碼
Course No.		 T5520
授課教師
Instructor		 林鴻明
學分數
Credit		 3.0 必/選修
core required/optional		 選修 開課年級
Level		 研究所
先修科目或先備能力(Course Pre-requisites)：無
課程概述與目標(Course Overview and Goals)：This course will cover the underlying principles of scanning and transmission electron microscopy with an emphasis on transmission electron microscopy. There will be both theoretical and practical treatment of such essential phenomena as sample preparation, microscope construction, electron optics, imaging, electron diffraction, and analytical microscopy.
教科書(Textbook) J. W. Edington, Practical Electron Microscopy in Materials Science, MacMillan, Philips Technical Library, Eindhoven (1974).
Monograph One - "The Operation and Calibration of the Electron Microscope"
Monograph Two - "Elect
參考教材(Reference) 1. D. B. Williams and C. B. Carter, Transmission Electron Microscopy, Vol. I-IV, Plenum Press, New York, (1996).
2. Saul Wischnitzer, "Introduction to Electron Microscopy", 3rd Edition, Pergamon Press, New York, (1989).
3. M. H.
課程大綱 Syllabus 學生學習目標
Learning Objectives		 單元學習活動
Learning Activities		 學習成效評量
Evaluation		 備註
Notes
序
No.		 單元主題
Unit topic		 內容綱要
Content summary
1 I. Preliminary Sample Preparation for TEM
Concepts of vacuum Background Review 		The student will learn the background of the development of electron microscope and the based techniques of sample preparations.  
2 I. Preliminary Sample Preparation for TEM
Concepts of vacuum 		The concepts of vacuum will describe for student to undersatnd the system design of TEM.  
3 II. Physical Description of Electron Microscopy Historical Background
Geometric optics 		The histroy of EM will introduce in this week. The principle of geometric optics is compared to the electron optics and guide student to undersatnd the electron optic system in EM.  
4 II. Physical Description of Electron Microscopy Properties of electrons
Resolution Limitations of Imaging Systems 		The propeties of electrons are important to understand the optics and wave properties of electron. It will affect the resolution limitation of EM. Students will guide to learn the physical properties of electron microscope.  
5 II. Physical Description of Electron Microscopy Lenses for electrons
Electron Sources 		The lenses of electrons will introduce in this week. Student will learn the design principle of magnetic lens. Also, the different electron sources are compared for student to know the importance of field emission source in recent EM.  
6 II. Physical Description of Electron Microscopy Operating principles of TEM, SEM, STEM
Construction of TEM, SEM, STEM 		Students will learn the operating principles of TEM, SEM and STEM. Also, this week will guide the student to understand the construction of TEM, SEM and STEM systems.  
7 II. Physical Description of Electron Microscopy Information obtained from TEM, SEM, STEM The students will learn the information that electron microscope can obtain. It will help student to analysis the image and stucture of materials.  
8 II. Geometry of Electron Diffraction Reciprocal lattice constructions
Ewald sphere constructions 		The foundament of diffration will review for student to understand the principle of reciprocal lattice. It will help student to analysis the structure of material using electron diffraction.  
9 Midterm Exam The midterm exam will cover Chapter I to II and the the principle of reciprocal lattice that is introdcue in Chapter III. To evalute the learn achievement of students for past 8 weeks.  
10 III. Geometry of Electron Diffraction Wavevectors formulation of diffraction, deviation parameter Student will learn the principle and deviation of electron diffraction. The will help students to analysis the diffratcion pattern to study the structure of materials.  
11 III. Geometry of Electron Diffraction Kikuchi patterns and channelling patterns Kikuchi patterns and channelling patterns are important in structure analysis. Students will deeply learn how to analysis the structure of materials more precisously.  
12 IV. Principles of Image Formation Interactions of electrons with matter, scattering
Kinematical theory of scattering 		The students will learn the interaction of electron and matter. That will affect the contrast of image. It will help to interpret the information of images. The theory of imfomation will also introduce.  
13 IV. Principles of Image Formation Kinematical theory of scattering
Dynamical theory of scattering (Howie-Whelan Equations) 		This week will mostly introduce the theory of image formation. Students will learn the image formation from the basic theory.  
14 IV. Principles of Image Formation Image interpretation The case study of image interpretation will introduce in this week. Students will practically learn to interpretation image in different defects of materials.  
15 V. Analytical Electron Microscopy Electron probes, beam current vs. size
SEM, STEM imaging 		This weeks will introduce the analytical function of EM. Students will undersatnd the important of probe sixe and current that affect the analytical EM.  
16 V. Analytical Electron Microscopy Microdiffraction and nanodiffraction
Convergent beam electron diffraction 		The capacitity of micordiffration and nanomicrodiffraction are important for mordern EM in nanoanalysis. Students will guide how to use these techniques for material analysis.  
17 V. Analytical Electron Microscopy X-ray analysis
Electron energy loss spectroscopy 		Elemental anlysis used EM will introduce in this week. It includes EDS, WDS and EELS analysis. Students will learn how to combine the structure, composition and image analysis techniques for material study.  
18 Final Exam Final exam will cover partial of Chapeter III and include all Chapter IV to V. Final evaulate the learn achievement of students.  
彈性教學週活動規劃
序
No.		 實施期間
Period		 實施方式
Content		 教學說明
Teaching instructions		 彈性教學評量方式
Evaluation		 備註
Notes


教學要點概述：
1.自編教材 Handout by Instructor：
■ 1-1.簡報 Slids
□ 1-2.影音教材 Videos
■ 1-3.教具 Teaching Aids
□ 1-4.教科書 Textbook
□ 1-5.其他 Other
□ 2.自編評量工具/量表 Educational Assessment
□ 3.教科書作者提供 Textbook

成績考核 Performance Evaluation： 期末考：30%   期中考：30%   彈性教學：10%   作業：30%  

教學資源(Teaching Resources)：
■ 教材電子檔(Soft Copy of the Handout or the Textbook)
■ 課程網站(Website)
課程網站(Website)：硬碟二
扣考規定：https://curri.ttu.edu.tw/p/412-1033-1254.php